Per- and polyfluoroalkyl substances (PFAS), often called “forever chemicals,” have gained widespread attention due to their persistence in the environment and potential health impacts. While many discussions around PFAS focus on consumer goods or drinking water contamination, one lesser-known but significant contributor to PFAS usage is the semiconductor industry. As chips become smaller, faster, and more complex, the materials used to manufacture them must also evolve—often relying on PFAS-based chemicals for their unique properties.

But what role do PFAS really play in chip manufacturing, and what does this mean for environmental responsibility in a rapidly growing tech sector?

What Are PFAS, and Why Are They Used in Semiconductors?

PFAS are a large group of synthetic chemicals characterized by strong carbon-fluorine bonds, making them incredibly resistant to heat, water, and oil. These properties make them ideal for industrial applications where durability and stability are crucial.

In semiconductor manufacturing, PFAS are used in several key areas:

• Photolithography: PFAS-containing photoresists and developers are used to etch microscopic patterns onto silicon wafers.

• Etching and Cleaning: Fluorinated gases and solvents, many of which are PFAS-based, are essential in plasma etching and wafer cleaning processes.

• Coolants and Lubricants: Heat transfer fluids and lubricants often rely on PFAS to maintain performance under extreme temperatures and pressures.

• Protective Coatings: PFAS-based coatings help reduce contamination and increase yield during manufacturing.

The unique performance characteristics of PFAS are often unmatched by other materials, which is why they remain so entrenched in high-tech processes.

Environmental and Health Concerns

Despite their technical benefits, PFAS pose significant environmental and health risks. They do not break down naturally in the environment, accumulating in soil, water, and even human bloodstreams. Some PFAS have been linked to:

• Liver and kidney damage

• Hormonal disruption

• Certain cancers

• Immune system effects

Semiconductor fabs can contribute to PFAS pollution through wastewater discharges and atmospheric emissions. In countries with stringent regulations, wastewater treatment systems often target PFAS, but many of these chemicals are still incredibly difficult to remove completely.

Regulatory Pressures Are Mounting

Governments and environmental agencies worldwide are beginning to crack down on PFAS usage. The European Union has proposed one of the most aggressive bans on PFAS, with potential exemptions for critical industries like semiconductors—but only temporarily. In the U.S., the EPA has started adding certain PFAS to hazardous substance lists and requiring reporting from manufacturers.

For the semiconductor industry, this creates both risk and opportunity:

• Risk: Potential disruptions to supply chains and production processes if PFAS use becomes restricted.

• Opportunity: Innovating cleaner, PFAS-free alternatives and improving sustainability profiles, which can become a competitive advantage.

Is a PFAS-Free Future Possible?

The road to eliminating PFAS from semiconductor manufacturing is challenging. These chemicals are deeply embedded in the process infrastructure, and alternatives must meet extremely high standards of purity, stability, and performance.

However, several companies and research labs are investing in:

• Green chemistry solutions: Developing fluorine-free alternatives for photoresists and solvents.

• Advanced filtration systems: Improving wastewater treatment to capture and destroy PFAS before they reach the environment.

• Process optimization: Reducing the volume of PFAS required or recycling them within closed-loop systems.

While complete elimination may not be feasible in the short term, significant reductions are both possible and necessary.

As the semiconductor industry continues to underpin our digital lives—from smartphones to AI to electric vehicles—it must also reckon with its environmental footprint. PFAS are a critical but problematic component of chipmaking, and their phase-out will require innovation, investment, and collaboration across the industry. The companies that lead the way in addressing PFAS will not only reduce their regulatory risk but also position themselves as sustainability leaders in a world increasingly demanding cleaner tech.